@article {Stassi2021-ix,
	title = {Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators},
	journal = {Nature Communications},
	volume = {12},
	number = {1},
	year = {2021},
	month = {oct},
	pages = {1{\textendash}9},
	publisher = {Nature Publishing Group},
	abstract = {The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young{\textquoteright}s modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors.},
	keywords = {mechanical properties, NEMS, Sensors, Sensors and biosensors, Structural properties},
	author = {Stassi, Stefano and Cooperstein, Ido and Tortello, Mauro and Pirri, Candido Fabrizio and Magdassi, Shlomo and Ricciardi, Carlo}
}
